Research on the technology of femtosecond laser micromachining based on image edge tracing

被引：9

作者：

Zhang DongShi ^{[1
]}

Chen Feng ^{[1
]}

Liu HeWei ^{[1
]}

Wang XianHua ^{[1
]}

Du Kai ^{[1
]}

Si JinHai ^{[1
]}

Hou Xun ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Shaanxi Key Lab Photon Technol Informat, Xian 710049, Peoples R China

来源：

CHINESE SCIENCE BULLETIN | 2010年 / 55卷 / 09期

基金：

中国国家自然科学基金;

关键词：

femtosecond laser; image edge detection; micromachining; micro-pattern; CHANNEL WAVE-GUIDES; FABRICATION; GRATINGS; WRITTEN; GLASS;

D O I：

10.1007/s11434-009-0550-3

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Aiming at fabrication of complex microstructures and micro-patterns, a kind of femtosecond laser micromachining technology based on the BMP image edge tracing was proposed. We introduced the general principle of this technology and discussed the implementation of the machining paths extraction, optimization, tracing and the feedback of the machining procession in detail. On the basis of this technology, control software for femtosecond laser micromachining was developed. Furthermore, we have accomplished the fabrication of complicated two-dimensional (2D) micro-patterns on a copper thin film. The results indicate that this technology can be used for digital control micromachining of complex patterns or microstructures at micron and submicron scales by fermosecond laser.

引用

页码：877 / 881

页数：5

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