Growth process observation of homoepitaxial ZnO thin films using optical emission spectra during pulsed laser deposition

被引：6

作者：

Nakamura, Tatsuru ^{[1
]}

Masuko, Keiichiro ^{[1
]}

Ashida, Atsushi ^{[1
]}

Yoshimura, Takeshi ^{[1
]}

Fujimura, Norifumi ^{[1
]}

机构：

[1] Osaka Prefecture Univ, Grad Sch Engn, Dept Phys & Elect, Naka Ku, Osaka 5998531, Japan

来源：

THIN SOLID FILMS | 2010年 / 518卷 / 11期

关键词：

Zinc oxide; Homoepitaxial growth; Pulsed laser deposition; Optical emission spectroscopy;

D O I：

10.1016/j.tsf.2009.09.184

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Homoepitaxial ZnO thin films were prepared on the Zn-polar or O-polar ZnO substrates by pulsed laser deposition method Optical emission spectroscopy of the plume was carried out to estimate O/Zn flux ratio under the various deposition conditions such as oxygen pressure, laser fluence, and the distance between target and substrate. It is revealed that the O/Zn flux ratio could be controlled by laser fluence, oxygen pressure. and target-substrate distance. Zn-rich O/Zn flux promotes pit formation and O-rich flux yields the three-dimensional growth The difference of the growth process on Zn-polar or O-polar substrates is also discussed (C) 2009 Elsevier B V. All rights reserved

引用

页码：2971 / 2974

页数：4

共 14 条

[1] Atomic and molecular emissions of the laser-induced plasma during zinc and zinc oxide target ablation [J].

Acquaviva, S. ;

D'Anna, E. ;

De Giorgi, M. L. .

JOURNAL OF APPLIED PHYSICS, 2007, 102 (07)

[2] Interface characteristics of (Zn,Mn)O/ZnO grown on ZnO substrate [J].

Ashida, Atsushi ;

Masuko, Keiichiro ;

Edahiro, Toshiaki ;

Oshio, Takeshi ;

Fujimura, Norifumi .

JOURNAL OF CRYSTAL GROWTH, 2005, 275 (1-2) :E2211-E2215

[3] Studies of the plume accompanying pulsed ultraviolet laser ablation of zinc oxide [J].

Claeyssens, F ;

Cheesman, A ;

Henley, SJ ;

Ashfold, MNR .

JOURNAL OF APPLIED PHYSICS, 2002, 92 (11) :6886-6894

[4] Zener model description of ferromagnetism in zinc-blende magnetic semiconductors [J].

Dietl, T ;

Ohno, H ;

Matsukura, F ;

Cibert, J ;

Ferrand, D .

SCIENCE, 2000, 287 (5455) :1019-1022

[5] Formation of two-dimensional electron gas and the magnetotransport behavior of ZnMnO/ZnO heterostructure [J].

Edahiro, T ;

Fujimura, N ;

Ito, T .

JOURNAL OF APPLIED PHYSICS, 2003, 93 (10) :7673-7675

[6] High-quality ZnO epilayers grown on Zn-face ZnO substrates by plasma-assisted molecular beam epitaxy [J].

Kato, H ;

Sano, M ;

Miyamoto, K ;

Yao, T .

JOURNAL OF CRYSTAL GROWTH, 2004, 265 (3-4) :375-381

[7] Investigation of ZnO epilayers grown under various Zn/O ratios by plasma-assisted molecular-beam epitaxy [J].

Ko, HJ ;

Yao, T ;

Chen, YF ;

Hong, SK .

JOURNAL OF APPLIED PHYSICS, 2002, 92 (08) :4354-4360

[8] Characterization of homoepitaxial p-type ZnO grown by molecular beam epitaxy [J].

Look, DC ;

Reynolds, DC ;

Litton, CW ;

Jones, RL ;

Eason, DB ;

Cantwell, G .

APPLIED PHYSICS LETTERS, 2002, 81 (10) :1830-1832

[9] Spin-dependent transport in a ZnMnO/ZnO heterostructure [J].

Masuko, K. ;

Ashida, A. ;

Yoshimura, T. ;

Fujimura, N. .

JOURNAL OF APPLIED PHYSICS, 2008, 103 (07)

[10] Influence of antiferromagnetic exchange interaction on magnetic properties of ZnMnO thin films grown pseudomorphically on ZnO (000(1)over-bar) single-crystal substrates [J].

Masuko, K. ;

Ashida, A. ;

Yoshimura, T. ;

Fujimura, N. .

JOURNAL OF APPLIED PHYSICS, 2008, 103 (04)

← 1 2 →