Design and Modeling of a CMOS-MEMS Capacitive Resonator Based on Bonded-Dies for Gas Detection

被引：0

作者：

Gafare, Mawahib ^{[1
]}

Dennis, J. O. ^{[2
]}

Khir, M. H. Md ^{[1
]}

机构：

[1] Univ Teknol PETRONAS, Elect & Elect Dept, Bandar Seri Iskandar, Perak Darul Rid, Malaysia

[2] Univ Teknol PETRONAS, Fundamental & Appl Sci Dept, Bandar Seri Iskandar, PQ, Canada

来源：

2014 5TH INTERNATIONAL CONFERENCE ON INTELLIGENT AND ADVANCED SYSTEMS (ICIAS 2014) | 2014年

关键词：

CMOS-MEMS resonator; bonded-dies; capacitive sensor; electrostatically actuation; Mass detection; MASS; FILM; SENSORS;

D O I：

暂无

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

This paper presents a capacitive CMOS-MEMS resonator for mass detection. Mass detection is used in many applications such as chemical industries and biomedical diagnosis. The technique used for this work is two dies bonded in parallel direction to get change in the capacitance whenever there is a change in mass and the device is electro-statically actuated. The resonance frequency of the resonator without polymer layer is found to be 17.195 kHz. The mass sensitivity and gas sensitivity are found to be 3.78 mu Hz/fg and 26.99 mu Hz/ppb, respectively. The damping ratio is found to be 1.44 in air due to squeeze film damping.

引用

页数：6

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