Scanning force microscopy with two optical levers for detection of deformations of the cantilever

A scanning force microscope equipped with two optical levers was implemented to detect the deformations of the cantilever with multidegree of freedom. By measuring the deflection and torsion at two different points on the cantilever, enough information was obtained to distinguish bending from buckling and thus detect the relative displacement of the tip end paint to the base of the cantilever in the x, y, and z directions. Movement of the tip end point when scanning mica in the repulsive mode was monitored and plotted at regular time intervals. The plot revealed stick points reflecting the lattice structure as well as the trajectory of the tip. The sample was rotated with 30 degrees increments to verify the operation of the proposed detection system. (C) 1996 American Vacuum Society.