Thick film PZT arrays vibration modes

被引:0
|
作者
Gwirc, S [1 ]
García, F [1 ]
Pérez, N [1 ]
Negreira, C [1 ]
机构
[1] Inst Nacl Tecnol Ind, CITEI, Buenos Aires, DF, Argentina
来源
2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2002年
关键词
ultrasound; thick film; piezoelectric;
D O I
暂无
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
In this work we report some electroacoustic characteristics of miniature piezoelectric ultrasound transducers, manufactured by screen printing and using thick film technology. To make transducer samples, ink with PZT powder and a glass frit was employed. PZT films of 100-130 mum thick were screen-printed between two gold electrodes over alurnina. Electrical impedance and acoustic emission continuous-wave analysis at 1-10 MHz range shows two main vibrating modes, one of PZT layer itself and other with substrate and PZT vibrating as a whole and coupling characteristics of a two elements set and an array.
引用
收藏
页码:1189 / 1191
页数:3
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