共 50 条
- [21] Preparation of Thick PZT Ceramic Film by an Interfacial Polymerization Journal of Sol-Gel Science and Technology, 1998, 13 : 821 - 825
- [25] Ultrasonic PZT gas sensor using thick film technology 1997 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 & 2, 1997, : 427 - 431
- [26] Thick-film PZT-silicon micromechanical resonator ELECTRONICS LETTERS, 2000, 36 (19) : 1661 - 1662
- [28] MEMS ultrasonic sensor array with thick film PZT transducers 2005 IEEE Ultrasonics Symposium, Vols 1-4, 2005, : 491 - 494
- [29] Microfabrication process of PZT thick film by aerosol deposition method 2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2006, : 1288 - +
- [30] Fabrication of PZT thick film through centrifugal sedimentation method CERAMIC PROCESSING SCIENCE, 1998, 83 : 219 - 228