Fluctuations of the magnetically-supported dc discharge in coaxial configuration

被引：3
作者：
Bilyk, O
Holík, M
Marek, A
Kudrna, P
Tichy, M
Behnke, JF
机构：
[1] Charles Univ Prague, Fac Math & Phys, Dept Elect & Vaccum Phys, CR-18000 Prague 8, Czech Republic
[2] EMA Univ, Inst Phys, D-17487 Greifswald, Germany
来源：
VACUUM | 2004年 / 76卷 / 04期
关键词：
fluctuations; magnetron; Langmuir probe; power density spectrum;
D O I：
10.1016/j.vacuum.2004.06.001
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Floating potential fluctuations have been studied in DC discharge plasma in two cylindrical magnetron systems using the data from simile and double cylindrical Langmuir probes. The power spectral density was calculated from the experimental data in the range of magnetic fields 15-35 mT and at different pressures and probe axial positions within the discharge vessel. Plots of power spectral density vs frequency and vs wave number are presented. The possible mechanism of generation of observed fluctuations in relation to their measured properties is discussed. (C) 2004 Elsevier Ltd. All rights reserved.
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收藏
页码：437 / 445
页数：9
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