Heterodyne standing-wave interferometer

被引:1
作者
Ortlepp, Ingo [1 ]
Manske, Eberhard [1 ]
Zoellner, Jens-Peter [2 ]
Rangelow, Ivo [2 ]
机构
[1] Tech Univ Ilmenau, Inst Proc Measurement & Sensor Technol, D-98693 Ilmenau, Germany
[2] Tech Univ Ilmenau, Micro & Nanoelect Syst Grp, D-98693 Ilmenau, Germany
关键词
Standing wave; heterodyne; interferometer; photo sensor;
D O I
10.1515/teme-2018-0017
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This manuscript describes a novel standing-wave arrangement with two laser sources of different wavelengths, emitting towards each other. The resulting standing wave has a continuously moving intensity profile, a thin, transparent photo sensor is inserted into. When the sensor is moved along the optical axis a frequency shift, proportional to the velocity, occurs. This frequency shift can be evaluated for the purpose of interferometric length measurements.
引用
收藏
页码:S80 / S85
页数:6
相关论文
共 8 条
  • [1] Buchner H., 1983, STEHENDE WELLEN INTE
  • [2] Thin transparent pin-photodiodes for length measurements
    Bunte, E
    Mandryka, V
    Jun, KH
    Büchner, HJ
    Jäger, G
    Stiebig, H
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2004, 113 (03) : 334 - 337
  • [3] Mandryka V., 2009, THESIS
  • [4] Ortlepp I., 2016, MINIATUR STEHENDE WE, P418, DOI [10.5162/sensoren2016/6.1.2, DOI 10.5162/SENSOREN2016/6.1.2]
  • [5] Ortlepp I., 2015, ULTRATHIN TRANSPAREN, P1519
  • [6] Standing wave detection and interferometer application using a photodiode thinner than optical wavelength
    Sasaki, M
    Mi, XY
    Hane, K
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (14) : 2008 - 2010
  • [7] Heterodyne interferometer laser source with a pair of two phase locked loop coupled He-Ne lasers by 632.8 nm
    Sternkopf, C.
    Diethold, C.
    Gerhardt, U.
    Wurmus, J.
    Manske, E.
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2012, 23 (07)
  • [8] Wiener O., 1890, ANN PHYS-BERLIN, V276, P203, DOI DOI 10.1002/ANDP.18902760603