Influence of Fabrication Error on the Characteristics of a 2-D Photonic-Crystal Cavity

被引：15

作者：

Fan, Wenjuan ^{[1
]}

Hao, Zhibiao ^{[1
]}

Li, Zheng ^{[1
]}

Zhao, Yunsong ^{[1
]}

Luo, Yi ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Elect Engn, State Key Lab Integrated Optoelect, Tsinghua Natl Lab Informat Sci & Technol, Beijing 100084, Peoples R China

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 2010年 / 28卷 / 10期

基金：

国家高技术研究发展计划(863计划); 中国国家自然科学基金;

关键词：

Microcavities; photonic crystals; statistics; DISORDER;

D O I：

10.1109/JLT.2010.2043058

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Statistical studies on the scanning electron microscope (SEM) images of two-dimensional photonic crystal (PhC) slab cavities show that fabrication errors in the size and position of etched air holes follow Gaussian distribution. The influences on the characteristics of PhC cavities are then investigated and compared with those caused by fabrication error with widely-accepted uniform distribution through finite-difference time domain (FDTD) simulation. As expected, Gaussian distribution in fabrication error has more significant impact on cavity characteristics than uniform distribution simply by their difference in the fourth moment.

引用

页码：1455 / 1458

页数：4

共 20 条

[1] High-Q photonic nanocavity in a two-dimensional photonic crystal [J].