In-situ potential mapping of space charge layer in GaN nanowires under electrical field by off-axis electron holography

被引:6
作者
Chen, Xiao [1 ,2 ]
Wang, Yanguo [2 ]
Guo, Jie [3 ]
Jian, Jikang [3 ]
Gu, Lin [2 ,4 ]
Zhang, Zhihua [1 ]
机构
[1] Dalian Jiaotong Univ, Liaoning Key Mat Lab Railway, Dalian 116028, Peoples R China
[2] Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
[3] Xinjiang Univ, Sch Phys Sci & Technol, Urumqi 830046, Peoples R China
[4] Collaborat Innovat Ctr Quantum Matter, Beijing 100190, Peoples R China
基金
中国国家自然科学基金;
关键词
Space charge layer; Electron holography; In-situ TEM; Semiconductor nanowire; Semiconductor-metal contact; CAPACITANCE; DIODES;
D O I
10.1016/j.pnsc.2016.03.009
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In situ potential mapping of space charge (SC) layer in a single GaN nanowire (NW) contacted to the Au metal electrode has been conducted using off-axis electron holography in order to study the space distribution of SC layer under electric biases. Based on the phase image reconstructed from the complex hologram the electrostatic potential at the SC layer was clearly revealed; the SC width was estimated to be about 76 nm under zero bias condition. In order to study dynamic interrelation between the SC layer and bias conditions, the variation of the electrostatic potential due to change of the SC widths respond to the different bias conditions have also been examined. The measured SC layers are found to vary between 68 nm and 91 nm, which correspond to the saturated SC layers at the GaN-Au contact under the forward and reverse bias conditions, respectively. By plotting the square widths of the SC layer against the applied voltages, donor density of GaN NWs was derived to be about 4.3*10(6) cm(-3). Our experiments demonstrate that in-situ electron holography under electric field can be a useful method to investigate SC layers and donor density in single NW and other heterostructures. (C) 2016 Chinese Materials Research Society. Production and hosting by Elsevier B.V.
引用
收藏
页码:163 / 168
页数:6
相关论文
共 18 条
[1]   AlGaN/GaN HEMTs grown on SiC substrates [J].
Binari, SC ;
Redwing, JM ;
Kelner, G ;
Kruppa, W .
ELECTRONICS LETTERS, 1997, 33 (03) :242-243
[2]   High transconductance AlGaN/GaN heterostructure field effect transistors on SiC substrates [J].
Chen, Q ;
Yang, JW ;
Kahn, MA ;
Ping, AT ;
Adesida, I .
ELECTRONICS LETTERS, 1997, 33 (16) :1413-1415
[3]  
Colinge J.P., 1981, PHYS SEMICONDUCTOR D, P140
[4]   SURFACE STATES AND BARRIER HEIGHT OF METAL-SEMICONDUCTOR SYSTEMS [J].
COWLEY, AM ;
SZE, SM .
JOURNAL OF APPLIED PHYSICS, 1965, 36 (10) :3212-&
[6]   CAPACITANCE-VOLTAGE MEASUREMENT AND MODELING ON A NANOMETER-SCALE BY SCANNING C-V MICROSCOPY [J].
HUANG, Y ;
WILLIAMS, CC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (01) :369-372
[7]   Large-scale GaN nanobelts and nanowires grown from milled Ga2O3 powders [J].
Jian, JK ;
Chen, XL ;
He, M ;
Wang, WJ ;
Zhang, XN ;
Shen, F .
CHEMICAL PHYSICS LETTERS, 2003, 368 (3-4) :416-420
[8]   ELECTRON HOLOGRAPHY .2. 1ST STEPS OF HIGH-RESOLUTION ELECTRON HOLOGRAPHY INTO MATERIALS SCIENCE [J].
LICHTE, H ;
VOLKL, E ;
SCHEERSCHMIDT, K .
ULTRAMICROSCOPY, 1992, 47 (1-3) :231-240
[9]   Electron holography - basics and applications [J].
Lichte, Hannes ;
Lehmann, Michael .
REPORTS ON PROGRESS IN PHYSICS, 2008, 71 (01)
[10]  
Lucia M.L., 1993, EUR J PHYS, V14, P85