Enhanced piezoelectricity of thin film hafnia-zirconia (HZO) by inorganic flexible substrates

被引：26

作者：

Hsain, H. Alex ^{[1
,2
]}

Sharma, Pankaj ^{[2
]}

Yu, Hyeonggeun ^{[1
]}

Jones, Jacob L. ^{[1
,2
]}

So, Franky ^{[1
]}

Seidel, Jan ^{[2
]}

机构：

[1] North Carolina State Univ, Mat Sci & Engn, Raleigh, NC 27695 USA

[2] Univ New South Wales, Sch Mat Sci & Engn, Sydney, NSW 2052, Australia

来源：

APPLIED PHYSICS LETTERS | 2018年 / 113卷 / 02期

基金：

澳大利亚研究理事会; 美国国家科学基金会;

关键词：

ROOM-TEMPERATURE FERROELECTRICITY; PIEZORESPONSE; NANOSCALE; FIELD;

D O I：

10.1063/1.5031134

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Hf0.5Zr0.5O2 (HZO) films are grown on rigid glass and flexible polyimide substrates using non-rapid thermal annealing. Films are comparatively investigated using macroscopic and local probe-based approaches to characterize their ferroelectric and piezoelectric properties. The polarization-electric field (P-E) measurements reveal that the ferroelectric characteristics of these thin films agree with the observed switchable piezoresponse hysteresis loops as well as electrically written, oppositely oriented domains. Moreover, the HZO thin films grown on flexible polyimide substrates display significantly enhanced piezoelectric response in comparison to the films grown on rigid substrates. This effect is likely due to improved domain wall motion caused by the mechanical release of the film-substrate couple. These findings suggest that inherently lead-free HZO thin films on flexible substrates are potential candidate materials for improved piezoelectric applications in wearable devices. Published by AIP Publishing.

引用

页数：5

共 50 条

[11] Enhancement of Local Piezoresponse in Polymer Ferroelectrics via Nanoscale Control of Microstructure [J].

Choi, Yoon-Young ;

Sharma, Pankaj ;

Phatak, Charudatta ;

Gosztola, David J. ;

Liu, Yunya ;

Lee, Joonseok ;

Lee, Byeongdu ;

Li, Jiangyu ;

Gruverman, Alexei ;

Ducharme, Stephen ;

Hong, Seungbum .

ACS NANO, 2015, 9 (02) :1809-1819

[12] Ferroelectricity and ferroelectric resistive switching in sputtered Hf0.5Zr0.5O2 thin films [J].

Fan, Zhen ;

Xiao, Juanxiu ;

Wang, Jingxian ;

Zhang, Lei ;

Deng, Jinyu ;

Liu, Ziyan ;

Dong, Zhili ;

Wang, John ;

Chen, Jingsheng .

APPLIED PHYSICS LETTERS, 2016, 108 (23)

[13]

Fu DW, 2013, SCIENCE, V339, P425, DOI [10.1126/science.1229675, 10.1126/science.1230473]

[14] Impact of the TiN electrode deposition on the HfO2 band gap for advanced MOSFET gate stacks [J].

Gaumer, C. ;

Martinez, E. ;

Lhostis, S. ;

Guittet, M. -J. ;

Gros-Jean, M. ;

Barnes, J. -P. ;

Licitra, C. ;

Rochat, N. ;

Barrett, N. ;

Bertin, F. ;

Chabli, A. .

MICROELECTRONIC ENGINEERING, 2011, 88 (01) :72-75

[15] Substrate Clamping Effects on Irreversible Domain Wall Dynamics in Lead Zirconate Titanate Thin Films [J].

Griggio, F. ;

Jesse, S. ;

Kumar, A. ;

Ovchinnikov, O. ;

Kim, H. ;

Jackson, T. N. ;

Damjanovic, D. ;

Kalinin, S. V. ;

Trolier-McKinstry, S. .

PHYSICAL REVIEW LETTERS, 2012, 108 (15)

[16] Piezoresponse force microscopy and recent advances in nanoscale studies of ferroelectrics [J].

Gruverman, A ;

Kalinin, SV .

JOURNAL OF MATERIALS SCIENCE, 2006, 41 (01) :107-116

[17] LOCAL POLING OF FERROELECTRIC POLYMERS BY SCANNING FORCE MICROSCOPY [J].

GUTHNER, P ;

DRANSFELD, K .

APPLIED PHYSICS LETTERS, 1992, 61 (09) :1137-1139

[18] Transparent functional oxide stretchable electronics: micro-tectonics enabled high strain electrodes [J].

Gutruf, Philipp ;

Shah, Charan M. ;

Walia, Sumeet ;

Nili, Hussein ;

Zoolfakar, Ahmad S. ;

Karnutsch, Christian ;

Kalantar-zadeh, Kourosh ;

Sriram, Sharath ;

Bhaskaran, Madhu .

NPG ASIA MATERIALS, 2013, 5 :e62-e62

[19] Organic ferroelectrics [J].

Horiuchi, Sachio ;

Tokura, Yoshinori .

NATURE MATERIALS, 2008, 7 (05) :357-366

[20] Above-room-temperature ferroelectricity in a single-component molecular crystal [J].

Horiuchi, Sachio ;

Tokunaga, Yusuke ;

Giovannetti, Gianluca ;

Picozzi, Silvia ;

Itoh, Hirotake ;

Shimano, Ryo ;

Kumai, Reiji ;

Tokura, Yoshinori .

NATURE, 2010, 463 (7282) :789-U97

← 1 2 3 4 5 →