High-frequency ultrasound sensors using polymer microring resonators

被引:117
作者
Chao, Chung-Yen [1 ]
Ashkenazi, Shai
Huang, Sheng-Wen
O'Donnell, Matthew
Guo, L. Jay
机构
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
[2] Univ Michigan, Dept Biomed Engn, Ann Arbor, MI 48109 USA
关键词
D O I
10.1109/TUFFC.2007.341
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
Polymer microring resonators are demonstrated as high-frequency, ultrasound detectors. An optical microring resonator consists of a ring waveguide closely coupled to a straight bus waveguide, serving as light input and output. Acoustic waves irradiating the ring induce strain, deforming the waveguide dimensions and changing the refractive index of the waveguide via the elasto-optic effect. These effects modify the effective refractive index of the guided mode inside the waveguide. The sharp wavelength dependence of the microring resonance can enhance the optical response to acoustic strain. Such polymer microring resonators are experimentally demonstrated in detecting broadband ultrasound pulses from a 50 MHz transducer. Measured frequency response shows that these devices have potential in high-frequency, ultrasound detection. Design guidelines for polymer microring resonators forming an ultrasound detector array are discussed.
引用
收藏
页码:957 / 965
页数:9
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