Heteroepitaxial growth of InAs on GaAS(001) by in situ STM located inside MBE growth chamber

被引:18
作者
Tsukamoto, S.
Bell, G. R.
Arakawa, Y.
机构
[1] Univ Tokyo, Inst Ind Sci, Nanoelect Collaborat Res Ctr, Tokyo 1538505, Japan
[2] Univ Warwick, Dept Phys, Coventry CV4 7AL, W Midlands, England
关键词
scanning tunneling microscopy; molecular beam epitaxy; quantum dots; InAs; GaAs;
D O I
10.1016/j.mejo.2006.05.011
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The growth of InAs on GaAs(001) is of great interest primarily due to the self-assembly of arrays of quantum dots (QDs) with excellent opto-electronic properties. However, a basic understanding of their spontaneous formation is lacking. Advanced experimental methods are required to probe these nanostructures dynamically in order to elucidate their growth mechanism. Scanning tunneling microscopy (STM) has been successfully applied to many GaAs-based materials grown by molecular beam epitaxy (MBE). Typical STM-MBE experiments involve quenching the sample and transferring it to a remote STM chamber under arsenic-free ultra-high vacuum. In the case of GaAs-based materials grown at substrate temperatures of 400-600 degrees C, operating the STM at room temperature ensures that the surface is essentially static on the time scale of STM imaging. To attempt dynamic experiments requires a system in which STM and MBE are incorporated into one unit in order to scan in situ during growth. Here, we discuss in situ STM results from just such a system, covering both QDs and the dynamics of the wetting layer. (c) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1498 / 1504
页数:7
相关论文
共 21 条
[1]   THE AS-TERMINATED RECONSTRUCTIONS FORMED BY GAAS(001) - A SCANNING-TUNNELING-MICROSCOPY STUDY OF THE (2X4) AND C(4X4) SURFACES [J].
AVERY, AR ;
HOLMES, DM ;
SUDIJONO, J ;
JONES, TS ;
JOYCE, BA .
SURFACE SCIENCE, 1995, 323 (1-2) :91-101
[2]   Surface alloying at InAs-GaAs interfaces grown on (001) surfaces by molecular beam epitaxy [J].
Belk, JG ;
McConville, CF ;
Sudijono, JL ;
Jones, TS ;
Joyce, BA .
SURFACE SCIENCE, 1997, 387 (1-3) :213-226
[3]   In situ scanning tunneling microscopy of InAs quantum dots on GaAs(001) during molecular beam epitaxial growth [J].
Bell, GR ;
Pristovsek, M ;
Tsukamoto, S ;
Orr, BG ;
Arakawa, Y ;
Koguchi, N .
SURFACE SCIENCE, 2003, 544 (2-3) :234-240
[4]   Species intermixing and phase transitions on the reconstructed (001) surfaces of GaAs and InAs [J].
Bell, GR ;
Belk, JG ;
McConville, CF ;
Jones, TS .
PHYSICAL REVIEW B, 1999, 59 (04) :2947-2955
[5]   Strain relaxation and segregation effects during self-assembled InAs quantum dots formation on GaAs(001) [J].
García, JM ;
Silveira, JP ;
Briones, F .
APPLIED PHYSICS LETTERS, 2000, 77 (03) :409-411
[6]   A compact ultrahigh-vacuum system for the in situ investigation of III/V semiconductor surfaces [J].
Geng, P ;
Márquez, J ;
Geelhaar, L ;
Platen, J ;
Setzer, C ;
Jacobi, K .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (02) :504-508
[7]   Dynamics of In atom during InAs/GaAs(001) growth process [J].
Ishii, A ;
Fujiwara, K ;
Aisaka, T .
APPLIED SURFACE SCIENCE, 2003, 216 (1-4) :478-482
[8]   Island nucleation and growth on reconstructed GaAs(001) surfaces [J].
Itoh, M ;
Bell, GR ;
Avery, AR ;
Jones, TS ;
Joyce, BA ;
Vvedensky, DD .
PHYSICAL REVIEW LETTERS, 1998, 81 (03) :633-636
[9]   Composition of InAs quantum dots on GaAs(001): Direct evidence for (In,Ga)As alloying [J].
Joyce, PB ;
Krzyzewski, TJ ;
Bell, GR ;
Joyce, BA ;
Jones, TS .
PHYSICAL REVIEW B, 1998, 58 (24) :15981-15984
[10]   Effect of growth rate on the size, composition, and optical properties of InAs/GaAs quantum dots grown by molecular-beam epitaxy [J].
Joyce, PB ;
Krzyzewski, TJ ;
Bell, GR ;
Jones, TS ;
Malik, S ;
Childs, D ;
Murray, R .
PHYSICAL REVIEW B, 2000, 62 (16) :10891-10895