Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices

被引：72
作者：
Prume, Klaus [1 ]
Muralt, Paul
Calame, Florian
Schmitz-Kempen, Thorsten
Tiedke, Stephan
机构：
[1] aixACCT Syst GmbH, Aachen, Germany
[2] Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2007年 / 54卷 / 01期
关键词：
D O I：
10.1109/TUFFC.2007.206
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
We present a new measurement method to characterize piezoelectric thin films utilizing a four-point bending setup. In combination with a single- or a double-beam laser interferometer, this setup allows the determination of the effective transverse and longitudinal piezoelectric coefficients e(31,f) and d(33,f), respectively. Additionally, the dielectric coefficient and the large signal electrical polarization are measured to add further important characteristics of the film. These data are essential for piezoelectric thin film process specification and the design and qualification of microelectromechanical systems devices.
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页码：8 / 14
页数：7
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