Room temperature mechanical thinning and imprinting of solid films

被引:18
作者
Cross, Graham L. W. [1 ]
O'Connell, Barry S. [1 ]
Ozer, H. Ozgur [1 ]
Pethica, John B. [1 ]
机构
[1] Trinity Coll Dublin, Dept Phys, SFI Trinity Nanosci Lab, Dublin 2, Ireland
关键词
D O I
10.1021/nl0624566
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The mechanical patterning of thin films has received recent attention due to significant potential for efficient nanostructure fabrication. For solid films, mechanically thinning wide areas remains particularly challenging. In this work, we introduce a new plastic ratchet mechanism involving small amplitude (< 10 nm), oscillatory shear motion of the forging die. This isothermal mechanism significantly extends mass transport across surfaces, broadening the scope of nanoscale processing for a potentially wide class of solid ductile materials.
引用
收藏
页码:357 / 362
页数:6
相关论文
共 20 条
  • [11] Pattern uniformity control in room-temperature imprint lithography
    Hong, PS
    Lee, HH
    [J]. APPLIED PHYSICS LETTERS, 2003, 83 (12) : 2441 - 2443
  • [12] Basic conditions for material and structural ratcheting
    Hubel, H
    [J]. NUCLEAR ENGINEERING AND DESIGN, 1996, 162 (01) : 55 - 65
  • [13] Johnson K.L., 1987, Contact mechanics
  • [14] Khang DY, 2001, ADV MATER, V13, P749, DOI 10.1002/1521-4095(200105)13:10<749::AID-ADMA749>3.0.CO
  • [15] 2-7
  • [16] Impact of molecular weight of polymers and shear rate effects for nanoimprint lithography
    Schulz, H
    Wissen, M
    Bogdanski, N
    Scheer, HC
    Mattes, K
    Friedrich, C
    [J]. MICROELECTRONIC ENGINEERING, 2006, 83 (02) : 259 - 280
  • [17] Self-aligned, vertical-channel, polymer field-effect transistors
    Stutzmann, N
    Friend, RH
    Sirringhaus, H
    [J]. SCIENCE, 2003, 299 (5614) : 1881 - 1884
  • [18] Patterning of polymer-supported metal films by microcutting
    Stutzmann, N
    Tervoort, TA
    Bastiaansen, K
    Smith, P
    [J]. NATURE, 2000, 407 (6804) : 613 - 616
  • [19] Ward I.M., 1993, INTRO MECH PROPERTIE
  • [20] Complex optical surfaces formed by replica molding against elastomeric masters
    Xia, YN
    Kim, E
    Zhao, XM
    Rogers, JA
    Prentiss, M
    Whitesides, GM
    [J]. SCIENCE, 1996, 273 (5273) : 347 - 349