Effect of Methane Pressure on the Size of Carbon Nanoparticles Deposited by Pulsed Plasma Enhanced Chemical Vapor Deposition

被引：0
作者：
Rastkar, Ahmad R. [1 ]
Shokri, Babak [1 ]
Kabir, Mojtaba [1 ]
Amirzadeh, Maria [2 ]
Rahimipour, Mohammad R. [3 ]
机构：
[1] Shahid Beheshti Univ, Laser & Plasma Res Inst, Plasma Engn Grp, GC, Tehran, Iran
[2] Shahid Beheshti Univ, Sch Earth Sci, GC, Tehran, Iran
[3] Mat & Energy Res Ctr, Karaj, Iran
来源：
PLASMA PROCESSES AND POLYMERS | 2009年 / 6卷
关键词：
carbon; CVD; methane; nanoparticles; plasma pulsed dc; AMORPHOUS-CARBON; DIAMOND; BLACK; RAMAN;
D O I：
10.1002/ppap.200932207
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The nanoparticles of carbon were deposited from methane under the potential of a pulsed direct current discharge. The deposition was carried without external heating. The size, chemistry, and structure of carbon nanoparticles were characterized using transmission electron microscopy (TEM), X-ray diffraction (XRD), Raman and Fourier transform infrared (FTIR) spectroscopy. The minimum size of the nanoparticles was as low as 10 nm as shown by TEM. The nanocrystalline or amorphous structure of the particles was revealed by XRD. Raman spectroscopy indicated on the sp(2) bonds of carbon and FTIR spectroscopy identified the other bonds of carbon.
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页码：S855 / S859
页数：5
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