Design of a Planar High Precision Motion Stage

被引：0
|
作者：
Hermann, Gyula [1 ]
Tar, Jozsef K. [1 ]
Kozlowski, Krzysztof R. [2 ]
机构：
[1] Budapest Tech, John von Neumann Fac Informat, Inst Intelligent Engn Syst, Becsi Ut 96-B, H-1034 Budapest, Hungary
[2] Poznan Univ Tech, Chair Control & Syst Engn, PL-60965 Poznan, Poland
来源：
ROBOT MOTION AND CONTROL 2009 | 2009年 / 396卷
关键词：
MACHINE; ERROR;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：371 / +
页数：2
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