Multiple-Wavelength Vertical-Cavity Surface-Emitting Lasers by Grading a Spacer Layer for Short-Reach Wavelength Division Multiplexing Applications

被引：8
作者：
Dayal, Padullaparthi Babu [1 ]
Sakaguchi, Takahiro [1 ]
Matsutani, Akihiro [1 ]
Koyama, Fumio [1 ]
机构：
[1] Tokyo Inst Technol, Microsyst Res Ctr, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan
来源：
APPLIED PHYSICS EXPRESS | 2009年 / 2卷 / 09期
关键词：
VCSEL ARRAY; MULTIWAVELENGTH; OXIDATION; SPAN;
D O I：
10.1143/APEX.2.092501
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We propose and demonstrate a simple and unique method to fabricate the multiple-wavelength vertical-cavity surface-emitting lasers (VCSELs) emitting at 980 nm by grading only the first low-index spacer layer of SiO(2)/Ta(2)O(5) dielectric mirror. A multi step exposure to UV lithography followed by selective wet chemical etching has been applied to create spacer layer gradients. We have successfully realized equally spaced four-channel VCSELs with wavelength span exceeding 30.0 nm by grading a 230.0 nm spacer layer and achieved single mode lasing with a side mode suppression ratio in excess of 30.0 dB. (C) 2009 The Japan Society of Applied Physics
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