Local piezoelectric response in bismuth-based ferroelectric thin films investigated by scanning force microscopy

被引:12
作者
Fu, DS [1 ]
Suzuki, K [1 ]
Kato, K [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Moriyama Ku, Nagoya, Aichi 4638560, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2002年 / 41卷 / 10A期
关键词
ferroelectric; piezoelectric; scanning force microscopy; bismuth-based ferroelectric thin film;
D O I
10.1143/JJAP.41.L1103
中图分类号
O59 [应用物理学];
学科分类号
摘要
Scanning force microscopy (SFM) has been used to probe the local polarization state and piezoelectric properties of ferroelectric films. The conductive SFM tip was employed as a movable top electrode to detect the piezoresponse in the film induced by an ac voltage, Our measurements reveal a spatial dependence of the piezoelectric properties of individual grains of virgin ferroelectric films. A maximum effective piezoelectric coefficient of 5.5 pm/V has been detected in the lead-free CaBi(14)Ti(14)Oj(15) film.
引用
收藏
页码:L1103 / L1105
页数:3
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