RF MEMS and its Applications in Microwaves and Millimeter Waves

被引：0

作者：

Zhu, Shouzheng ^{[1
]}

机构：

[1] E China Normal Univ, Dept EE, Shanghai 200062, Peoples R China

来源：

2008 CHINA-JAPAN JOINT MICROWAVE CONFERENCE (CJMW 2008), VOLS 1 AND 2 | 2008年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

RF MEMS devices utilized micromachining technologies offer a high performance to several RF applications. They receive increasingly attentions in microwave researchers and Engineers in the recent years. This paper includes two parts. In the first part, a brief review of RF MEMS is presented. In the second part, some research work of the author's group on RF MEMS technology is introduced.

引用

页码：368 / 371

页数：4

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