Analysis of InP LEC melt flows using a parallel adaptive finite element scheme

被引:7
作者
Givoli, D [1 ]
Flaherty, JE [1 ]
Shephard, MS [1 ]
机构
[1] RENSSELAER POLYTECH INST,SCI COMPUTAT RES CTR,TROY,NY 12180
关键词
Czochralski; LEC; finite element; parallel; adaptive;
D O I
10.1016/S0022-0248(97)00225-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A single-phase model for Liquid Encapsulated Czochralski (LEC) melt flows of InP is used in conjunction with a new three-dimensional parallel adaptive finite element scheme. Buoyancy, crystal rotation and crucible rotation are accounted for. The effect of the encapsulant rotation on the flow in the melt is accounted for by using a special boundary condition on the melt surface. The results of some quasi-steady simulations are presented.
引用
收藏
页码:510 / 516
页数:7
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