The image of a line width test object in a scanning electron microscope with different energies of the probe electrons

被引：1

作者：

Volk, Ch P. ^{[1
]}

Mityukhlyaev, V. B. ^{[2
]}

Novikov, Yu A. ^{[3
]}

Rakov, A. V. ^{[3
]}

Todua, P. A. ^{[2
]}

机构：

[1] Res Inst Mol Elect & Mikron Factory, Moscow, Russia

[2] Res Ctr Study Properties Surfaces & Vacuum, Moscow, Russia

[3] Russian Acad Sci, Prokhorov Inst Gen Phys, Moscow, Russia

来源：

MEASUREMENT TECHNIQUES | 2009年 / 52卷 / 07期

关键词：

scanning electron microscope; test object; line width; electron probe;

D O I：

10.1007/s11018-009-9350-z

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Results of studies of the influence of the energy of the probe electrons in the range 0.3-20 keV on the image of a line width test object in the nanometric range in a scanning electron microscope are presented. It is shown that the range of energies of the primary electrons may be divided into three sub-ranges. At electron energies less than 2.5 keV (low-voltage operating mode) and greater than 10 keV (high-voltage operating mode) the image that is formed in the course of collecting secondary slow electrons can be used to take measurements of the line width of a test object by means of known methods. For the intermediate range of energies of the primary electrons, there are no methods that may be used to measure the line width.

引用

页码：713 / 718

页数：6

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