Optical metasurfaces for high angle steering at visible wavelengths

被引:63
作者
Lin, Dianmin [1 ]
Melli, Mauro [1 ]
Poliakov, Evgeni [1 ]
St Hilaire, Pierre [1 ]
Dhuey, Scott [2 ]
Peroz, Christophe [1 ]
Cabrini, Stefano [2 ]
Brongersma, Mark [3 ]
Klug, Michael [1 ]
机构
[1] Mag Leap Inc, Plantation, FL 33322 USA
[2] Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
[3] Stanford Univ, Geballe Lab Adv Mat, Stanford, CA 94305 USA
关键词
PANCHARATNAM-BERRY PHASE; DIELECTRIC METASURFACES; POLARIZATION; LIGHT; LENSES; FABRICATION; REFLECTION; RESOLUTION; HOLOGRAMS; ELEMENTS;
D O I
10.1038/s41598-017-02167-4
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Metasurfaces have facilitated the replacement of conventional optical elements with ultrathin and planar photonic structures. Previous designs of metasurfaces were limited to small deflection angles and small ranges of the angle of incidence. Here, we have created two types of Si-based metasurfaces to steer visible light to a large deflection angle. These structures exhibit high diffraction efficiencies over a broad range of angles of incidence. We have demonstrated metasurfaces working both in transmission and reflection modes based on conventional thin film silicon processes that are suitable for the large-scale fabrication of high-performance devices.
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页数:8
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