CVD diamond films for electronics

被引：1
|
作者：
Rosa, J [1 ]
Vanecek, M [1 ]
Nesladek, M [1 ]
机构：
[1] LIMBURGS UNIV CTR,DIV MAT PHYS,INST MAT RES,B-3590 DIEPENBEEK,BELGIUM
来源：
CZECHOSLOVAK JOURNAL OF PHYSICS | 1997年 / 47卷 / 07期
关键词：
D O I：
10.1023/A:1021282601098
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Mechanical, optical, thermal and electronic properties of diamond films and chemical vapour deposition (CVD) techniques are briefly reviewed. Some spectroscopical methods for the characterization of CVD diamond films are described (optical absorption, photothermal deflection spectroscopy, Raman spectroscopy and electron paramagnetic resonance), together with our recent results on investigation of electronic properties of the main defects in this material, relevant to the application of CVD diamond films for the future electronic devices.
引用
收藏
页码：707 / 716
页数：10
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