Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing

被引:29
作者
Nikolajeff, F [1 ]
Hard, S [1 ]
Curtis, B [1 ]
机构
[1] PAUL SCHERRER INST,CH-8048 ZURICH,SWITZERLAND
来源
APPLIED OPTICS | 1997年 / 36卷 / 32期
关键词
diffractive optical element; homogenizer; excimer laser; replication; hot embossing; reactive ion etching;
D O I
10.1364/AO.36.008481
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A diffractive beam homogenizer, based on an array of square, off-axis, continuous-relief diffractive microlenses, for use with an excimer laser has been studied. We originally fabricated the homogenizer by direct-write electron-beam lithography, from which we made replicas in UV-grade fused silica by hot embossing and reactive ion etching. Atomic force microscopy measurements of original and replicated elements showed the accuracy of the replication fidelity. One of the replicated homogenizers was evaluated together with a KrF excimer laser. The homogenized beam had a flat-top profile with 31% of the beam energy contained within an area where the beam intensity was above a threshold level of 90% of the maximum intensity. (C) 1997 Optical Society of America.
引用
收藏
页码:8481 / 8489
页数:9
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