Recent advances in optical MEMS devices and systems

被引：1

作者：

Patterson, PR ^{[1
]}

Hah, D ^{[1
]}

Lee, MMC ^{[1
]}

Tsai, JC ^{[1
]}

Wu, MC ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA

来源：

PHOTONIC DEVICES AND ALGORITHMS FOR COMPUTING IV | 2002年 / 4788卷

关键词：

angular vertical combdirve; micromirrors; MEMS; NEMS; optical scanner; optical switch; photonic crystal; photonic bandgap; SOI-MEMS; SUMMiT-V; WDM;

D O I：

10.1117/12.453712

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed novel optical micro-electro-mechanical systems, (MEMS) and nano-electro-mechanical, (NEMS) optical components for applications including imaging, switching, and optical integrated circuits. This paper provides an overview of current optical MEMS/NEMS research projects in our integrated photonics laboratory at UCLA. Three optical MEMS/NEMS devices: a large, 1 mm diameter, scanning micromirror for imaging applications, an analog micromirror array for network switching applications, and a nanoscale photonic crystal switch for integrated photonic circuit applications will be described.

引用

页码：1 / 8

页数：8

共 19 条

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