Analysis and Study of a MEMS Vibrating Ring Gyroscope with High Sensitivity

The solid wave gyroscope has the advantages of high sensitivity, good reliability and wide dynamic range. In this paper, a new high sensitivity MEMS vibrating ring gyroscope is proposed. According to the working characteristics and sensitivity principle of solid wave gyroscope, the sensitivity of the gyroscope is analyzed and simulated by FEM. First, the ring sensitive structure and the whole structure of MEMS gyroscope are designed, and its dynamic principle is discussed. Second, the sensitivity numerical model of ring sensitive structure is established, and the relationship between sensitivity and principal design parameters is analyzed. Finally, the model simulation, electrostatic driving analysis, sensitivity analysis and limit displacement analysis of the ring sensitive structure are studied. The results is shown that the resonant frequency of the MEMS vibrating ring gyroscope is 6.0360kHz, the driving displacement is 2.91 mu m, and the mechanical sensitivity is 0.0036 mu m/(degrees).