Effects of synthesis conditions on self-organized growth of aligned arrays of silicon nanowires

被引：1
作者：
Niu, Jun-Jie [1 ]
Wang, Jian-Nong [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Sch Mat Sci & Engn, Shanghai 200030, Peoples R China
来源：
CHEMICAL VAPOR DEPOSITION | 2006年 / 12卷 / 12期
关键词：
D O I：
10.1002/cvde.200604229
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Communication: The effects of CVD synthesis conditions, including nano-channel alumina (NCA) properties, catalyst distribution, and growth parameters on aligned arrays of silicon nanowires (SiNWs) are investigated. Array-ordered SiNWs are achieved by optimizing the above factors according to the vapor-liquid-solid (VLS) and nanochannel physical limitation mechanism. The study of arrays of SiNWs will permit better understanding of the growth mechanism and develop potential applications in nanoelectronics technology.
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页码：709 / +
页数：4
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