Low-temperature growth of nano-structured silicon thin films on ITO initiated by metal catalysts

被引：2

作者：

Alet, Pierre-Jean ^{[1
,2
]}

Palacin, Serge ^{[1
]}

Cabarrocas, Pere Roca I. ^{[2
]}

机构：

[1] CEA, IRAMIS, SPCSI, LCSI, F-91191 Gif Sur Yvette, France

[2] Ecole Polytech, CNRS, LPICM, F-91128 Palaiseau, France

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 23期

关键词：

Thin films; Nano-structure; Copper; Gold; Silicon; Catalysis; Plasma-Enhanced Chemical Vapor Deposition; SILANE; SURFACES; NANOSTRUCTURES; ADSORPTION; CU(111); CELLS;

D O I：

10.1016/j.tsf.2009.02.106

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nano-structured silicon thin films have been grown on tin-doped indium oxide (ITO) by Plasma-Enhanced Chemical Vapor Deposition (PECVD) at temperatures lower than 200 degrees C. Nanometer-scaled aggregates of metal (copper or gold) obtained from evaporated layers were necessary to initiate the nano-structuring growth. Different deposition conditions have been investigated. The highest aspect ratio was obtained with copper and high-pressure plasmas with SiH4 diluted in H-2. The metals help dissociating silane so the deposition starts faster on the aggregates than around them, which leads to nano-structuration. It is likely that the metal remains confined at the interface between ITO and silicon and do not diffuse in the silicon layer. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：6405 / 6408

页数：4

共 21 条

[1] Hybrid solar cells based on thin-film silicon and P3HT
Alet, P. -J.
Palacin, S.
Cabarrocas, P. Roca I.
Kalache, B.
Firon, M.
de Bettignies, R.
[J]. EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2006, 36 (03) : 231 - 234
[2] Transition from thin gold layers to nano-islands on TCO for catalyzing the growth of one-dimensional nanostructures
Alet, Pierre-Jean
Eude, Laurent
Palacin, Serge
Roca i Cabarrocas, Pere
[J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2008, 205 (06): : 1429 - 1434
[3] Influence of Cu as a catalyst on the properties of silicon nanowires synthesized by the vapour-solid-solid mechanism
Arbiol, Jordi
Kalache, Billel
Cabarrocas, Pere Roca i
Morante, Joan Ramon
Morral, Anna Fontcuberta i
[J]. NANOTECHNOLOGY, 2007, 18 (30)
[4] Hybrid polymer-metal oxide thin films for photovoltaic applications
Boucle, Johann
Ravirajan, Punniamoorthy
Nelson, Jenny
[J]. JOURNAL OF MATERIALS CHEMISTRY, 2007, 17 (30) : 3141 - 3153
[5] A FULLY AUTOMATED HOT-WALL MULTIPLASMA-MONOCHAMBER REACTOR FOR THIN-FILM DEPOSITION
CABARROCAS, PRI
CHEVRIER, JB
HUC, J
LLORET, A
PAREY, JY
SCHMITT, JPM
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (04): : 2331 - 2341
[6] Ordered organic-inorganic bulk heterojunction photovoltaic cells
Coakley, KM
Liu, YX
Goh, C
McGehee, MD
[J]. MRS BULLETIN, 2005, 30 (01) : 37 - 40
[7] Interaction of silane with Cu(111): Surface alloy and molecular chemisorbed phases
Curson, NJ
Bullman, HG
Buckland, JR
Allison, W
[J]. PHYSICAL REVIEW B, 1997, 55 (16): : 10819 - 10829
[8] Semiconductor nanowires: From self-organization to patterned growth
Fan, HJ
Werner, P
Zacharias, M
[J]. SMALL, 2006, 2 (06) : 700 - 717
[9] Exciton splitting and carrier transport across the amorphous-silicon/polymer solar cell interface
Gowrishankar, Vignesh
Scully, Shawn R.
McGehee, Michael D.
Wang, Qi
Branz, Howard M.
[J]. APPLIED PHYSICS LETTERS, 2006, 89 (25)
[10] Fabrication of densely packed, well-ordered, high-aspect-ratio silicon nanopillars over large areas using block copolymer lithography
Gowrishankar, Vignesh
Miller, Nathaniel
McGehee, Michael D.
Misner, Matthew J.
Ryu, Du Yeol
Russell, Thomas P.
Drockenmuller, Eric
Hawker, Craia J.
[J]. THIN SOLID FILMS, 2006, 513 (1-2) : 289 - 294

← 1 2 3 →