Low-voltage solution-processed n-channel organic field-effect transistors with high-k HfO2 gate dielectrics grown by atomic layer deposition

被引:27
作者
Tiwari, Shree Prakash [1 ]
Zhang, Xiao-Hong [1 ]
Potscavage, William J., Jr. [1 ]
Kippelen, Bernard [1 ]
机构
[1] Georgia Inst Technol, Sch Elect & Comp Engn, COPE, Atlanta, GA 30332 USA
基金
美国国家科学基金会;
关键词
atomic layer deposition; contact resistance; electron mobility; hafnium compounds; high-k dielectric thin films; organic field effect transistors; organic semiconductors; semiconductor-insulator boundaries;
D O I
10.1063/1.3269579
中图分类号
O59 [应用物理学];
学科分类号
摘要
High performance solution-processed n-channel organic field-effect transistors based on [6,6]-phenyl C61 butyric acid methyl ester with low operating voltages (3 V) are demonstrated using a high-k hafnium dioxide gate dielectric grown by atomic layer deposition. Devices exhibit excellent n-channel performance with electron mobility values up to 0.14 cm(2)/V s, threshold voltages of similar to 0.3 V, current on/off ratios >10(5), and very low values of subthreshold slope (similar to 140 mV/decade).
引用
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页数:3
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