Techniques to study the reliability of metal RF MEMS capacitive switches.

被引：44
作者：
De Wolf, I
van Spengen, WM
机构：
[1] IMEC VZW, B-3001 Louvain, Belgium
[2] Katholieke Univ Leuven, EE Dept, Louvain, Belgium
来源：
MICROELECTRONICS RELIABILITY | 2002年 / 42卷 / 9-11期
关键词：
D O I：
10.1016/S0026-2714(02)00232-9
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, the relevant failure modes of capacitive RF MEMS devices are discussed, as are the techniques to study them. Covered are topics like dielectric charging, creep and stiction. The techniques discussed include scanning electron microscopy (SEM), atomic force microscopy (AFM), interferometric optical inspection and electrical lifetime testing. (C) 2002 Published by Elsevier Science Ltd.
引用
收藏
页码：1789 / 1794
页数：6
相关论文
共 12 条
  • [1] The role of interfacial properties on MEMS performance and reliability
    de Boer, MP
    Knapp, JA
    Mayer, TM
    Michalske, TA
    [J]. MICROSYSTEMS METROLOGY AND INSPECTION, 1999, 3825 : 2 - 15
  • [2] Techniques for reliability analysis of MEMS RF switch
    DeNatale, J
    Mihailovich, R
    Waldrop, J
    [J]. 40TH ANNUAL PROCEEDINGS: INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, 2002, : 116 - 117
  • [3] EHMKE J, 1999, Patent No. 9925643
  • [4] Goldsmith C, 2001, IEEE MTT-S, P227, DOI 10.1109/MWSYM.2001.966876
  • [5] Critical review: Adhesion in surface micromechanical structures
    Maboudian, R
    Howe, RT
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (01): : 1 - 20
  • [6] Newman HS, 2002, INT RELIAB PHY SYM, P111
  • [7] REBEITZ GM, 2000, IEEE MICROWAVE M DEC, P59
  • [8] ROTTENBERG X, 2002, IN PRESS EUMW 2002 M
  • [9] An auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness
    van Spengen, WM
    De Wolf, I
    Puers, B
    [J]. MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING III, 2000, 4175 : 104 - 112
  • [10] VANSPENGEN WM, 2002, IN PRESS J MICROMECH
12