High Accuracy Measurement of Aspherical Surface by Point Diffraction Interferometry

被引：0

作者：

Gao, Fen ^{[1
,2
]}

Jiang, Zhuangde ^{[1
]}

Feng, Yi ^{[3
]}

Li, Bing ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China

[2] Xian Technol Univ, Sch Optoelect Engn, Xian 710032, Peoples R China

[3] Xian ZoomView Optoelect Sci & Technol Co Ltd, Xian 710065, Peoples R China

来源：

2014 IEEE 14TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) | 2014年

关键词：

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

Point diffraction interferometry (PDI) provides a promising method for measurement of spherical and aspherical surfaces with nanometer or even sub-nanometer (RMS) accuracy. In this paper, an optimal design of PDI system is discussed in detail and experiment systems are established. A 152.4 mm aspheric mirror is measured in our experiment and the test results show a good agreement with Zygo interferometer testing results. Also, a novel method which combining the point diffraction interferometry and annular subaperture stitching technology for high accuracy measurement of large-departure aspherical surface is proposed and the principles are presented.

引用

页码：428 / 432

页数：5

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