Electrical properties of Schottky diode Pt/SiC and Pt/porous SiC performed on highly resistif p-type 6H-SiC

被引:14
作者
Bourenane, K. [1 ]
Keffous, A. [1 ]
Nezzal, G. [1 ]
机构
[1] UDTS, Algiers, Alger, Algeria
关键词
silicon carbide; Schottky diode; platinum; porous silicon carbide;
D O I
10.1016/j.vacuum.2006.09.009
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We investigated the electrical characteristics of two different Schottky diode as Pt/SiC and Pt/porous SiC, elaborated on highly resistif hot-pressed p-type 6H-SiC supplied by Goodfellow. The Schottky diode was characterized in air ambient and in vacuum, this latter could be used for exhaust gas monitoring as gas sensors for different gas (O-2, H-2, CO, CO2 and hydrocarbure). The result shows an ideality factor in ranae 1.1-1.5 with a barrier height varying between 0.780 and 0.950eV function of the ambient characterization. The result indicated clearly the dependence of electrical parameters on the surface whose Schottky contact was realized (Pt) and on the ambient where the electrical tests were performed. (c) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码:663 / 668
页数:6
相关论文
共 20 条
[1]   Excess noise characteristics of hydrogenated amorphous silicon p-i-n photodiode films [J].
Akiyama, M ;
Hanada, M ;
Takao, H ;
Sawada, K ;
Ishida, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (4B) :2552-2555
[2]   GENERALIZED NORDE PLOT INCLUDING DETERMINATION OF THE IDEALITY FACTOR [J].
BOHLIN, KE .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (03) :1223-1224
[3]   Luminescence properties of spark-processed SiC [J].
Chang, SS ;
Sakai, A .
MATERIALS LETTERS, 2004, 58 (7-8) :1212-1217
[4]   EXTRACTION OF SCHOTTKY DIODE PARAMETERS FROM FORWARD CURRENT-VOLTAGE CHARACTERISTICS [J].
CHEUNG, SK ;
CHEUNG, NW .
APPLIED PHYSICS LETTERS, 1986, 49 (02) :85-87
[5]   Large area image sensing structures based on a-SiC:H:: a dynamic characterization [J].
Fernandes, M ;
Vieira, M ;
Rodrigues, I ;
Martins, R .
SENSORS AND ACTUATORS A-PHYSICAL, 2004, 113 (03) :360-364
[6]  
FERRERO S, 2002, THESIS ELETTRONICA P
[7]   Progress towards SiC products [J].
Harris, CI ;
Savage, S ;
Konstantinov, A ;
Bakowski, M ;
Ericsson, P .
APPLIED SURFACE SCIENCE, 2001, 184 (1-4) :393-398
[8]   INTENSE BLUE EMISSION FROM POROUS BETA-SIC FORMED ON C+-IMPLANTED SILICON [J].
LIAO, LS ;
BAO, XM ;
YANG, ZF ;
MIN, NB .
APPLIED PHYSICS LETTERS, 1995, 66 (18) :2382-2384
[9]   AN IMPROVED FORWARD IV METHOD FOR NONIDEAL SCHOTTKY DIODES WITH HIGH SERIES RESISTANCE [J].
LIEN, CD ;
SO, FCT ;
NICOLET, MA .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1984, 31 (10) :1502-1503
[10]   Full color light emission from amorphous SiCx:H with organic-inorganic structures [J].
Ma, TF ;
Xu, J ;
Du, JF ;
Li, W ;
Huang, XF ;
Chen, KJ .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (11) :6408-6412