共 50 条
- [31] Micro-electromechanical Systems for Nano-science Journal of Nanoparticle Research, 2000, 2 : 413 - 418
- [32] ON/OFF SWITCHABLE HIGH-Q CAPACITIVE-PIEZOELECTRIC ALN RESONATORS 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2014, : 1265 - 1268
- [33] Micro-electromechanical systems: Motion control of micro-actuators PROCEEDINGS OF THE 37TH IEEE CONFERENCE ON DECISION AND CONTROL, VOLS 1-4, 1998, : 4334 - 4335
- [34] Electromechanical Model Applied to Piezoelectric Resonators XXVI BRAZILIAN CONGRESS ON BIOMEDICAL ENGINEERING, CBEB 2018, VOL. 2, 2019, 70 (02): : 679 - 685
- [37] Frequency characterization of AlN piezoelectric resonators PROCEEDINGS OF THE 2007 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM-JOINTLY WITH THE 21ST EUROPEAN FREQUENCY AND TIME FORUM, VOLS 1-4, 2007, : 374 - 377
- [38] Note: Experimental study on feasibility of a flexural traveling wave piezoelectric device for biomedical micro-electromechanical system REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (06):
- [39] Modeling and Simulation of Nonlinear Micro-electromechanical Circular Plate SMART SCIENCE, 2013, 1 (01): : 59 - 63