On/Off Micro-electromechanical Switching of AlN Piezoelectric Resonators

被引:0
|
作者
Nordquist, Christopher D. [1 ]
Olsson, Roy H., III [1 ]
Scott, Sean. M. [2 ]
Branch, Darren. W. [1 ]
Pluym, Tammy [1 ]
Yarberry, Victor [1 ]
机构
[1] Sandia Natl Labs, POB 5800, Albuquerque, NM 87185 USA
[2] Sandia, Albuquerque, NM USA
来源
2013 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST (IMS) | 2013年
关键词
Piezoelectric transducers; resonator filters; radiofrequency microelectromechanical systems; acoustic devices; MEMS; FILTERS;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report the first switchable piezoelectric resonator as a building block for a new class of adaptive and reconfigurable filters. The resonator integrates AlN contour-mode resonator and RF MEMS capacitive switch technologies to change the coupling between the RF signal electrodes and the AlN piezoelectric film. Modeling reveals that a 1.5 mu m gap minimizes coupling, while a 10 nm gap couples nearly as efficiently as an electrode in intimate contact, suggesting that high contrast can be achieved using this approach. Measurements of a 400 mu m x 150 mu m two-port resonator demonstrate a switching ratio of 13 dB, a Q of 170, and a center frequency of 240 MHz. Research is continuing with goals of improving the device Q and switching ratio, extending the device operation to other frequencies, and extending the approach to adaptive and reconfigurable filters.
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页数:4
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