Thickness effect and mesoscopic character of the metal oxide gas sensing nano-thin films

被引：0

作者：

Xing Jianping ^{[1
]}

Li Juan ^{[1
]}

Zhou Lei ^{[1
]}

Li Jianming ^{[2
]}

Qiu Nanyuan ^{[2
]}

机构：

[1] Shandong Univ, Sch Informat Sci & Engn, Jinan 250100, Peoples R China

[2] Shandong Univ, Nano Thin Film Elect Funct Mat Lab, Jinan 250100, Peoples R China

来源：

NANOSCIENCE AND TECHNOLOGY, PTS 1 AND 2 | 2007年 / 121-123卷

关键词：

thickness effect; diffusion reaction; thin film; gas sensing;

D O I：

10.4028/www.scientific.net/SSP.121-123.1341

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The characters of metal oxide gas sensing nano-thin films are studied. The formula of the dynamical thickness effect characteristic time is given. The relation of the sensitivity S and the film thickness 1, the character of existing the optimum thickness, the character of the change of conductance activity energy with the film thickness are given also. The idea of diffusion reaction of gas sensing mechanism and the idea of mesoscopic effect in the nano-thin films are proposed.

引用

页码：1341 / 1345

页数：5

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