A review on echo and phase inverted scanning in acoustic microscopy for failure analysis

被引：4

作者：

Ahmad, Badrul Hisham ^{[1
]}

Al-Shaikhli, Taha Raad ^{[1
]}

Hassan, Nornikman ^{[1
]}

Ibrahim, Ayman Mohammed ^{[1
]}

Lim, P. E. ^{[2
]}

Nordin, Nurul Syahira ^{[1
]}

机构：

[1] Univ Teknikal Malaysia Melaka UTeM, Ctr Telecommun Res & Innovat CeTRI, Fac Elect & Comp Engn FKeKK, Durian Tunggal, Melaka, Malaysia

[2] ST Microelect Sdn Bhd, Muar, Johor, Malaysia

来源：

PRZEGLAD ELEKTROTECHNICZNY | 2021年 / 97卷 / 03期

关键词：

Acoustic microscopy; C-mode scanning acoustic-microscope (C-SAM); Confocal scanning acoustic-microscope (CSAM); Scanning acoustic-microscope (SAM);

D O I：

10.15199/48.2021.03.02

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper is a review on the part of the failure analysis in the semiconductor region, especially in the integrated circuit (IC) design. Initially, the literature review depends on the keyword of acoustic-microscopy. Then, it followed by the example on the scanning acoustic-microscope (SAM), confocal scanning acoustic-microscope (CSAM), and C-mode scanning acoustic-microscope (C-SAM) technique. These three SAM techniques are used in various situation and have a different effect on the sample. Previous works on SAM, C-SAM and CSAM related technologies are reviewed by many researchers in this paper.

引用

页码：9 / 14

页数：6

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