A review on echo and phase inverted scanning in acoustic microscopy for failure analysis

被引：4

作者：

Ahmad, Badrul Hisham ^{[1
]}

Al-Shaikhli, Taha Raad ^{[1
]}

Hassan, Nornikman ^{[1
]}

Ibrahim, Ayman Mohammed ^{[1
]}

Lim, P. E. ^{[2
]}

Nordin, Nurul Syahira ^{[1
]}

机构：

[1] Univ Teknikal Malaysia Melaka UTeM, Ctr Telecommun Res & Innovat CeTRI, Fac Elect & Comp Engn FKeKK, Durian Tunggal, Melaka, Malaysia

[2] ST Microelect Sdn Bhd, Muar, Johor, Malaysia

来源：

PRZEGLAD ELEKTROTECHNICZNY | 2021年 / 97卷 / 03期

关键词：

Acoustic microscopy; C-mode scanning acoustic-microscope (C-SAM); Confocal scanning acoustic-microscope (CSAM); Scanning acoustic-microscope (SAM);

D O I：

10.15199/48.2021.03.02

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper is a review on the part of the failure analysis in the semiconductor region, especially in the integrated circuit (IC) design. Initially, the literature review depends on the keyword of acoustic-microscopy. Then, it followed by the example on the scanning acoustic-microscope (SAM), confocal scanning acoustic-microscope (CSAM), and C-mode scanning acoustic-microscope (C-SAM) technique. These three SAM techniques are used in various situation and have a different effect on the sample. Previous works on SAM, C-SAM and CSAM related technologies are reviewed by many researchers in this paper.

引用

页码：9 / 14

页数：6

共 29 条

[1] An Overview of Non-Destructive Testing Methods for Integrated Circuit Packaging Inspection
Aryan, Pouria
Sampath, Santhakumar
Sohn, Hoon
[J]. SENSORS, 2018, 18 (07)
[2] Bertocci F., 2019, SCANNING ACOUSTIC MI, P1
[3] A one-dimensional numerical model of acoustic wave propagation in a multilayered structure of a resistance spot weld
Chertov, AM
Maev, RG
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2005, 52 (10) : 1783 - 1790
[4] Acoustic microscopy of internal structure of resistance spot welds
Chertov, Andrey M.
Maev, Roman G.
Severin, Fedar M.
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2007, 54 (08) : 1521 - 1529
[5] De Wolf I., 2018, P 44 INT S TEST FAIL, P8
[6] ULTRASONIC ABSORPTION MICROSCOPE
DUNN, F
FRY, WJ
[J]. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1959, 31 (05) : 632 - 633
[7] Hassan N., 2019, ARPN J ENG APPL SCI, V14, P2437
[8] Compact MIMO Slots Antenna Design with Different Bands and High Isolation for 5G Smartphone Applications
Ibrahim, A. M.
Ibrahim, I. M.
Shairi, N. A.
[J]. BAGHDAD SCIENCE JOURNAL, 2019, 16 (04) : 1093 - 1102
[9] Ibrahim A. M., 2020, PROZLAD ELEKTROTECHN, P43
[10] Jakob A., 2009, 2009 IEEE International Ultrasonics Symposium, P1722, DOI 10.1109/ULTSYM.2009.5442024

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