Research on pitch analysis methods for calibration of one-dimensional grating standard based on nanometrological AFM

被引：2

作者：

Huang, Qiangxian ^{[1
,2
]}

Gonda, Satoshi ^{[2
]}

Misumi, Ichiko ^{[2
]}

Keem, Taeho ^{[2
]}

Kurosawa, Tomizo ^{[2
]}

机构：

[1] Hefei Univ Technol, Sch Instrument Sci & Optoelect Engn, Hefei 230009, Anhui, Peoples R China

[2] Natl Inst Adv Ind Sci & Technol, Natl Metrol Inst Japan, Tsukuba, Ibaraki 3058563, Japan

来源：

THIRD INTERNATIONAL SYMPOSIUM ON PRECISION MECHANICAL MEASUREMENTS, PTS 1 AND 2 | 2006年 / 6280卷

关键词：

pitch calibration; grating standard; AFM; nanometrology;

D O I：

10.1117/12.715251

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

By present, the calibration of dimensions in nano scale is being paid more and more attentions. One-dimensional grating standard with pitches in nano-scale is being proposed by the CCL-WGDM 7 to be one of the five key comparison parameters in the emerging field of nanometrology. In the pitch calibration of grating standard, Gravity Center Method and Zero-Cross Points Method are proposed. The two methods are analyzed and simulated under different conditions. Based on the actual measurement data obtained by AFM, the two methods are used and the best value is determined. The results in the paper are useful to pitch calibration in nano scale.

引用

页数：7

共 3 条

[1] Pitch calibration of one-dimensional grating standard by tapping mode nano-metrological atomic force microscope
Huang Qiangxian
Misumi, Ichiko
Gonda, Satoshi
Sato, Osamu
Kurosawa, Tomizo
SIGNAL ANALYSIS, MEASUREMENT THEORY, PHOTO-ELECTRONIC TECHNOLOGY, AND ARTIFICIAL INTELLIGENCE, PTS 1 AND 2, 2006, 6357
[2] Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope
Misumi, I
Gonda, S
Kurosawa, T
Takamasu, K
MEASUREMENT SCIENCE AND TECHNOLOGY, 2003, 14 (04) : 463 - 471
[3] Error investigation for SI traceable pitch calibration of one-dimensional grating by grazing-incidence small-angle X-ray scattering
Hori, Yasuaki
Gonda, Satoshi
MEASUREMENT, 2024, 225

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