Electron energy distributions in inductively coupled plasma: Comparison of chlorine discharge with argon discharge

被引：10

作者：

Yonemura, S ^{[1
]}

Nanbu, K ^{[1
]}

Sakai, K ^{[1
]}

机构：

[1] Tohoku Univ, Inst Fluid Sci, Sendai, Miyagi 9808577, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 10期

关键词：

electron energy distribution; inductively coupled plasma; particle-in-cell/Monte Carlo method; chlorine plasma; argon plasma;

D O I：

10.1143/JJAP.41.6189

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The characteristics of the electron energy distribution functions (EEDFs) in inductively-coupled discharges of chlorine and argon gases are Studied numerically. The EEDFs in atomic gases such as Ar and Cl show the three-temperature distribution with depletion in the high-energy region and enhancement in the low-energy region. By contrast, the EEDF for Cl-2 shows the bi-Maxwellian distribution close to the Maxwellian one. The reason for this difference is explained by the difference of electronic inelastic collision cross sections between atomic and molecular gases. The EEDFs obtained in the present simulation agree with the earlier experimental results qualitatively.

引用

收藏

页码：6189 / 6196

页数：8

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