Approximate description of the nonmaxwellian electron distribution in a global model

被引：13

作者：

Kudryavtsev, AA ^{[1
]}

Tsendin, LD

机构：

[1] St Petersburg State Univ, St Petersburg, Russia

[2] St Petersburg State Tech Univ, St Petersburg, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2002年 / 28卷 / 10期

基金：

俄罗斯基础研究基金会;

关键词：

D O I：

10.1134/1.1519025

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Within the framework of a global model, the nonmaxwellian behavior of electrons is taken into account in terms of a two-temperature approximation. Using the condition of stationary discharge, it is possible to determine the temperature of high-energy electrons T-eh as an eigenvalue. For a given gas, this temperature is a function of the parameter pLambda and weakly (logarithmically) depends on the conditions, being virtually the same for various types of gas discharge at pLambda = const. Using the energy balance for the electron gas, it is possible to determine the electron density n(e) from the absorbed power. (C) 2002 MAIK "Nauka/Interperiodica".

引用

页码：841 / 844

页数：4

共 21 条

[1]

Berezhnoi SV, 1998, PLASMA PHYS REP, V24, P556

[2]

Biberman L. M., 1973, Soviet Physics - Uspekhi, V15, P375, DOI 10.1070/PU1973v015n04ABEH004987

[3]

Francis G., 1960, Ionization Phenomena in Gases

[4]

GINSBURG VL, 1960, SOV PHYS USP, V3, P115

[5]

Godyak in V, 1997, ELECT KINETICS APPL, P241

[6] Effective electron collision frequency and electrical conductivity of radio frequency plasmas [J].

Godyak, VA ;

Piejak, RB ;

Alexandrovich, BM .

JOURNAL OF APPLIED PHYSICS, 1999, 85 (06) :3081-3083

[7] On the effect of the electron energy distribution on the plasma parameters of an argon discharge: a global (volume-averaged) model study [J].

Gudmundsson, JT .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2001, 10 (01) :76-81

[8] Modelling an Ar-Hg fluorescent lamp plasma using a 3 electron-temperature approximation [J].

Hartgers, A ;

van der Mullen, JAM .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (12) :1907-1913

[9] Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics [J].

Kiehlbauch, MW ;

Graves, DB .

JOURNAL OF APPLIED PHYSICS, 2002, 91 (06) :3539-3546

[10] Global model of inductively coupled Ar plasmas using two-temperature approximation [J].

Kimura, T ;

Ohe, K .

JOURNAL OF APPLIED PHYSICS, 2001, 89 (08) :4240-4246

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