Method of Probe Radius Compensation for Optical Complex Surface Measurement

When surface measuring with a contact method, the data obtained by the LM50 laser interferometer is the data of the center of the probe actually, not the real measurement point. Therefore, based on the theory of NURBS and the theory of Delaunay triangulation, a method of "enveloping surface - triangulation" is proposed, and the normal vector of the measuring points of the surface is derived so that the radius of the probe is compensated accurately and quickly. After triangular segmentation, the normal vector of each triangle around a measuring point has an influence on the normal vector of the vertex, so it is necessary to calculate the weight function of each triangulation. In this paper, the influence of the edge length and the angle factor on the vertex normal vector is considered, and the calculation of the vertex normal vector is improved in the triangulation, and the programming and calculation are simplified on the premise of guaranteeing the accuracy.