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- [2] Wafer scale manufacturing and integration of micro-optical systems GRADIENT INDEX, MINIATURE, AND DIFFRACTIVE OPTICAL SYSTEMS II, 2001, 4437 : 79 - 90
- [3] Strategies for precision adhesive bonding of micro-optical systems COMPONENTS AND PACKAGING FOR LASER SYSTEMS, 2015, 9346
- [4] Integration of micro-optical systems for fluorescence detection in μTAS applications MICRO TOTAL ANALYSIS SYSTEMS 2000, PROCEEDINGS, 2000, : 163 - 166
- [6] A plethora of micro-optical systems GRADIENT INDEX, MINIATURE, AND DIFFRACTIVE OPTICAL SYSTEMS II, 2001, 4437 : 125 - 133
- [7] Integration of the DRIE, MUMPs, and bulk micromachining for superior micro-optical systems MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, : 97 - 100
- [8] System integration of micro-optical systems for beam steering and modulation applications MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS III, 1998, 3276 : 88 - 95