共 22 条
Numerical simulation of combined flow in Czochralski crystal growth
被引:13
作者:
Geng, X
Wu, XB
Guo, ZY
机构:
[1] Department of Engineering Mechanics, Tsinghua University
关键词:
numerical simulation;
Czochralski;
crystal growth;
convection;
D O I:
10.1016/S0022-0248(97)00109-7
中图分类号:
O7 [晶体学];
学科分类号:
0702 ;
070205 ;
0703 ;
080501 ;
摘要:
Melt flow is one of the important factors influencing the crystal quality in CZ crystal growth. In typical crystal growth systems, the Grashof number and Reynolds number of the melt are large and consequently make numerical simulation difficult. In this paper, a mathematical model with realistic parameters is created to simulate, in terms of the control volume finite-difference approach, the combined flow in the melt, assuming steady, axisymmetric and laminar melt flow. The results show that the crucible rotation among different flow mechanisms is the most important one which dominates the melt flow.
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页码:309 / 319
页数:11
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