Preparation of lead monoxide films by KrF laser chemical vapor deposition from lead bis-dipivaloylmethanate

Lead monoxide films were prepared on a quartz substrate by KrF laser chemical vapor deposition technique front sublimated lead bis-dipivaloylmethanate at a substrate temperature of 423 K, a laser repetition rate of 50 Hz and a supply rate of the precursor of 150 mg/h at various laser fluences (100-500 J/m(2)) in an ambient atmosphere of it mixture of O-2 and He. In the case of low laser fluence (100 J/m(2)), the deposit obtained consisted of orthorhombic lead monoxide. massicot, but X-ray diffraction peaks corresponding to metallic lead appeared at higher laser fluences. The rate of deposition increased approximately linearly with increasing laser fluence. In order to avoid the intermixture of metallic lead into the film, an increase in oxygen gas content or the introduction of NO with or without implementing of a microwave discharge has been attempted. Implementing of a microwave discharge in N2O was the most effective in decreasing the content of the metallic phase. (C) 2002 Published by Elsevier Science B.V.