The use of a reduced model for on-line simulations of the Czochralski growth of single crystals

被引:2
|
作者
Olivari, E
Jacmin, P
vandenBogaert, N
Wertz, V
Dupret, F
机构
[1] CESAME, U. de Mecan. Appliquée, Univ. Catholique de Louvain, B-1348 Louvain-la-Neuve, Av. G
关键词
control (model based); numerical simulation; Czochralski growth; real time simulation;
D O I
10.1016/S0022-0248(97)00258-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A reduced dynamic simulation model is presented to accurately predict in real time the global heat transfer and the shape of the solidification front, for single crystals grown by the Czochralski process. This model, which is robust, reliable and fast, is devoted to be incorporated in a general control system, where it will behave as an observer/predictor in order to provide estimations for nonmeasurable process variables from which crystal quality can be inferred.
引用
收藏
页码:627 / 637
页数:11
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