Physical modeling of HZO-based ferroelectric field-effect transistors with a WOx channel

被引:3
|
作者
Wen, Xin [1 ]
Halter, Mattia [1 ,2 ]
Begon-Lours, Laura [2 ]
Luisier, Mathieu [1 ]
机构
[1] Integrated Syst Lab, Dept Elect Engn & Informat Technol, Zurich, Switzerland
[2] IBM Res GmbH, Zurich Res Lab, Ruschlikon, Switzerland
来源
基金
欧盟地平线“2020”;
关键词
HZO; FeFET; TCAD; ferroelectric modeling; device simulation;
D O I
10.3389/fnano.2022.900592
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The quasistatic and transient transfer characteristics of Hf0.57Zr0.43O2 (HZO)-based ferroelectric field-effect transistors (FeFETs) with a WO x channel are investigated using a 2-D time-dependent Ginzburg-Landau model as implemented in a state-of-the-art technology computer aided design tool. Starting from an existing FeFET configuration, the influence of different design parameters and geometries is analyzed before providing guidelines for next-generation devices with an increased "high (R-H ) to low (R-L )" resistance ratio, i.e., R-H /R-L . The suitability of FeFETs as solid-state synapses in memristive crossbar arrays depends on this parameter. Simulations predict that a 13 times larger R-H /R-L ratio can be achieved in a double-gate FeFET, as compared to a back-gated one with the same channel geometry and ferroelectric layer. The observed improvement can be attributed to the enhanced electrostatic control over the semiconducting channel thanks to the addition of a second gate. A similar effect is obtained by thinning either the HZO dielectric or the WOx channel. These findings could pave the way for FeFETs with enhanced synaptic-like properties that play a key role in future neuromorphic computing applications.
引用
收藏
页数:11
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