Soft magnetic properties of as-deposited Fe-Si-O thin films

被引：1
|
作者：
Yoon, TS
Li, Y
Koo, ES
Kim, CO
机构：
[1] Chungnam Natl Univ, Res Ctr Adv Magnet Mat, Yousung Gu, Taejon 305764, South Korea
[2] Shanghai Univ, Inst Mat, Shanghai 200041, Peoples R China
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2003年 / 254卷
关键词：
soft magnetic properties; thin film; nanocrystalline;
D O I：
10.1016/S0304-8853(02)00919-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The properties of the nanocrystalline as-deposited Fe-Si-O thin films fabricated by RF agnetron reactive sputtering method have been studied. The best magnetic softness obtained from as-deposited Fe79.8Si17.3O2.9 thin films is the saturation flux density of 17.2kG, coercivity of 3.1 Oe and effective permeability of about 1000 at 100 MHz. The electrical resistivity of Fe79.8Si17.3O2.9 thin film is 35 muOmega cm (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：416 / 418
页数：3
相关论文
共 50 条
  • [21] CO-(N, O)-BASED GRANULAR THIN-FILMS AND THEIR SOFT-MAGNETIC PROPERTIES
    OHNUMA, S
    FUJIMORI, H
    FURUKAWA, S
    MITANI, S
    MASUMOTO, T
    JOURNAL OF ALLOYS AND COMPOUNDS, 1995, 222 (1-2) : 167 - 172
  • [22] Effect of interface on microstructure and soft magnetic properties of Fe65 Co35 thin films
    Li Yan-Bo
    Liu Xi
    Li Zheng-Hua
    Fu Yu
    Kamzin, A. S.
    Wei Fu-Lin
    Yang Zheng
    ACTA PHYSICA SINICA, 2009, 58 (11) : 7972 - 7976
  • [23] Structure and soft magnetic properties of Fe-N thin films RF-sputtered on heated substrate
    Ohgai, T
    Shimono, R
    Saitoh, H
    Hayashi, Y
    MATERIALS TRANSACTIONS JIM, 1997, 38 (06): : 503 - 507
  • [24] Soft magnetic and structural properties of (FeCo)-(AlSi) alloy thin films
    Nakano, Takuma
    Nepal, Bhuwan
    Tanaka, Yoshitomo
    Wu, Shuang
    Abe, Kyotaro
    Mankey, Gary
    Mewes, Tim
    Mewes, Claudia
    Suzuki, Takao
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2020, 507
  • [25] Soft Magnetic Properties of HfxCo100−x Thin Films
    G. Durak Yüzüak
    E. Yüzüak
    Y. Elerman
    Journal of Superconductivity and Novel Magnetism, 2017, 30 : 3537 - 3540
  • [26] Soft Magnetic Properties of HfxCo100-x Thin Films
    Yuzuak, G. Durak
    Yuzuak, E.
    Elerman, Y.
    JOURNAL OF SUPERCONDUCTIVITY AND NOVEL MAGNETISM, 2017, 30 (12) : 3537 - 3540
  • [27] Magnetic and electric properties of Fe3O4 thin films sputtered on metallic underlayer
    Qin, F
    Nozaki, Y
    Matsuyama, K
    IEICE TRANSACTIONS ON ELECTRONICS, 2004, E87C (02): : 189 - 192
  • [28] The influence of production conditions on the magnetic properties of sputtered and laser deposited thin films
    Meydan, T
    Kockar, H
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2004, 6 (02): : 633 - 636
  • [29] Microstructure and magnetic properties of FeCoHfN thin films deposited by DC reactive sputtering
    Li, Tianyuan
    Liu, Xiyang
    Li, Jiawei
    Pan, Lining
    He, Aina
    Dong, Yaqiang
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2022, 547
  • [30] High frequency characteristics of soft magnetic Fe-O alloy thin films fabricated by helicon plasma sputtering
    Peng, D. L.
    Wang, W.
    Chen, Y.
    Sumiyama, K.
    Hihara, T.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2009, 469 (1-2) : 20 - 23
12345