Soft magnetic properties of as-deposited Fe-Si-O thin films

被引：1
|
作者：
Yoon, TS
Li, Y
Koo, ES
Kim, CO
机构：
[1] Chungnam Natl Univ, Res Ctr Adv Magnet Mat, Yousung Gu, Taejon 305764, South Korea
[2] Shanghai Univ, Inst Mat, Shanghai 200041, Peoples R China
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2003年 / 254卷
关键词：
soft magnetic properties; thin film; nanocrystalline;
D O I：
10.1016/S0304-8853(02)00919-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The properties of the nanocrystalline as-deposited Fe-Si-O thin films fabricated by RF agnetron reactive sputtering method have been studied. The best magnetic softness obtained from as-deposited Fe79.8Si17.3O2.9 thin films is the saturation flux density of 17.2kG, coercivity of 3.1 Oe and effective permeability of about 1000 at 100 MHz. The electrical resistivity of Fe79.8Si17.3O2.9 thin film is 35 muOmega cm (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：416 / 418
页数：3
相关论文
共 50 条
  • [11] Magnetic properties of Fe-Si-B thin films and their application as stress sensors
    Diguet, Gildas
    Makabe, Kei
    Froemel, Joerg
    Kurita, Hiroki
    Narita, Fumio
    Muroyama, Masanori
    THIN SOLID FILMS, 2022, 758
  • [12] Evolution of grain structure of as-deposited Cr thin films with deposition temperature
    Park, JK
    Kim, JH
    Park, SI
    Lee, HM
    Oh, DY
    SCRIPTA MATERIALIA, 2003, 48 (08) : 1161 - 1166
  • [13] Influence of substrate on soft magnetic properties of Fe-Co-Si/native oxide multilayer films
    Zuo, Huaping
    Ge, Shihui
    Zhang, Feng
    Wang, Guowei
    Xu, Min
    Wu, Chunhua
    Li, Lin
    ADVANCED ENGINEERING MATERIALS III, PTS 1-3, 2013, 750-752 : 965 - +
  • [14] Magnetic Domain Observation of Nd-Fe-B/Nd-Cu Thin Films Deposited on Si Substrate
    Shima, Toshiyuki
    Sato, Kohtaro
    Mishina, Yuriko
    Ohtsuki, Tomoyuki
    Iwama, Hiroki
    JOURNAL OF THE JAPAN INSTITUTE OF METALS, 2012, 76 (01) : 52 - 58
  • [15] Annealing effect on the soft magnetic properties of high moment FeCo-O thin films
    Ohnuma, S
    Kobayashi, N
    Fujimori, H
    Masumoto, T
    Xiong, XY
    Hono, K
    SCRIPTA MATERIALIA, 2003, 48 (07) : 903 - 908
  • [16] Improvement of magnetic properties of (111)-epitaxial nickel-zinc-ferrite thin films deposited on Si platform
    Wakiya, N
    Shinozaki, K
    Mizutani, N
    ELECTROCERAMICS IN JAPAN VII, 2004, 269 : 245 - 248
  • [17] Excellent soft magnetic properties realized in FeCoN thin films
    Zhang Lu-Ran
    Lu Hua
    Liu Xi
    Bai Jian-Min
    Wei Fu-Lin
    CHINESE PHYSICS B, 2012, 21 (03)
  • [18] Magnetic anisotropy in Fe films deposited on SiO2/Si(001) and Si(001) substrates
    Komogortsev, S. V.
    Varnakov, S. N.
    Satsuk, S. A.
    Yakovlev, I. A.
    Ovchinnikov, S. G.
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2014, 351 : 104 - 108
  • [19] Structural and optical properties of MgyNi1-yHx gradient thin films in relation to the as-deposited metallic state
    Gremaud, R.
    van Mechelen, J. L. M.
    Schreuders, H.
    Slaman, M.
    Dam, B.
    Griessen, R.
    INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2009, 34 (21) : 8951 - 8957
  • [20] Magnetic anisotropy factors of vapor deposited CoCr thin films on Si and glass substrates
    Kharmouche, A.
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2013, 327 : 91 - 94
12345