Indium Gallium Oxide Alloys: Electronic Structure, Optical Gap, Surface Space Charge, and Chemical Trends within Common-Cation Semiconductors

被引:71
作者
Swallow, Jack E. N. [1 ,2 ,3 ]
Palgrave, Robert G. [4 ]
Murgatroyd, Philip A. E. [1 ,2 ]
Regoutz, Anna [4 ]
Lorenz, Michael [5 ]
Hassa, Anna [5 ]
Grundmann, Marius [5 ]
von Wenckstern, Holger [5 ]
Varley, Joel B. [6 ]
Veal, Tim D. [1 ,2 ]
机构
[1] Univ Liverpool, Stephenson Inst Renewable Energy, Liverpool L69 7ZF, Merseyside, England
[2] Univ Liverpool, Dept Phys, Liverpool L69 7ZF, Merseyside, England
[3] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
[4] UCL, Dept Chem, London WC1H 0AJ, England
[5] Univ Leipzig, Felix Bloch Inst Solid State Phys, Leipzig, Germany
[6] Lawrence Livermore Natl Lab, Livermore, CA 94550 USA
基金
英国工程与自然科学研究理事会;
关键词
indium oxide; gallium oxide; indium gallium oxide; XPS; chemical trends; BAND OFFSETS; III-V; DEFORMATION POTENTIALS; STATES; ENERGIES;
D O I
10.1021/acsami.0c16021
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The electronic and optical properties of (InxGa1-x)(2)O-3 alloys are highly tunable, giving rise to a myriad of applications including transparent conductors, transparent electronics, and solar-blind ultraviolet photodetectors. Here, we investigate these properties for a high quality pulsed laser deposited film which possesses a lateral cation composition gradient (0.01 <= x <= 0.82) and three crystallographic phases (monoclinic, hexagonal, and bixbyite). The optical gaps over this composition range are determined, and only a weak optical gap bowing is found (b = 0.36 eV). The valence band edge evolution along with the change in the fundamental band gap over the composition gradient enables the surface space-charge properties to be probed. This is an important property when considering metal contact formation and heterojunctions for devices. A transition from surface electron accumulation to depletion occurs at x similar to 0.35 as the film goes from the bixbyite In2O3 phase to the monoclinic beta-Ga2O3 phase. The electronic structure of the different phases is investigated by using density functional theory calculations and compared to the valence band X-ray photoemission spectra. Finally, the properties of these alloys, such as the n-type dopability of In2O3 and use of Ga2O3 as a solar-blind UV detector, are understood with respect to other common-cation compound semiconductors in terms of simple chemical trends of the band edge positions and the hydrostatic volume deformation potential.
引用
收藏
页码:2807 / 2819
页数:13
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