FEM Analysis of a 3D Model of a Capacitive Surface-micromachined Accelerometer

被引：0

作者：

Szermer, Michal ^{[1
]}

Nazdrowicz, Jacek ^{[1
]}

Zabierowski, Wojciech ^{[1
]}

机构：

[1] Lodz Univ Technol, Dept Microelect & Comp Sci, Wolczanska 221-223, PL-90924 Lodz, Poland

来源：

2017 14TH INTERNATIONAL CONFERENCE: THE EXPERIENCE OF DESIGNING AND APPLICATION OF CAD SYSTEMS IN MICROELECTRONICS (CADSM) | 2017年

关键词：

Accelerometer; Comb-drive resonator; MEMS; Surface-micromachined; Finite Element Method; ACTUATORS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we present the analysis of a 3D model of a surface-micromachined accelerometer. It allows us to define basic mechanical parameters, which give us information about mechanical properties of the modelled sensor. The analysis has been performed in COMSOL Multiphysics software. We used the Finite Element Method (FEM) for the analysis of the 3D structure. We analysed the behaviour of our sensor for changing the acceleration up to 8g. We also checked the eigenfrequencies of the sensor in order to define its parameters.

引用

页码：432 / 434

页数：3

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